The integration of on-chip inductors with magnetic materials into silicon process technology is a major area of research for use in wireless communications, rf integrated circuits, power delivery and electromagnetic interference noise reduction.  Semiconductor companies are working to achieve a fully integrated monolithic solution, often referred to as a Power Supply on a Chip (PSoC). The use of magnetic films in these types of inductors provides significantly more compact structures, higher inductances and improved high frequency performance.  Post deposition magnetic annealing of the inductor structures optimises the material properties of magnet layers in the devices enhancing their performance characteristics.